A Hierarchical Circuit-Level Design Methodology for Microelectromechanical Systems
نویسندگان
چکیده
Gary K. Fedder and Qi Jing1 Abstract A circuit-level methodology for hierarchical design and nodal simulation of microelectromechanical systems (MEMS) is presented. A layout-based schematic view is introduced as a geometrically intuitive MEMS representation that is transformed into a schematic suitable for behavioral simulation. As examples of the design methodology, suspended-MEMS inertial sensors, resonant actuators and filters are designed using a small set of geometrically parameterized plate, beam, gap and anchor elements. Effects of manufacturing variations are evaluated by simply changing parameter values of the elements.
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